三分时时彩走势图app

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                HORIBA质量流量三分时时彩是正规的吗

                SEC-Z512MGX质量流量三分时时彩是正规的吗

                产品分类:HORIBA质量流量三分时时彩是正规的吗

                产品介绍

                Z512, Z522 Digital / Analog
                Mass Flow Controller / Meter
                SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX
                SEC-Z512X SEC-Z522XN SEC-Z522X
                SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX
                SEF-Z512X SEF-Z522XN SEF-Z522X
                Full-scale flow rate MR/MG number
                (N2 conversion flow rate) #R01:10SCCM
                #R1.5:17.5SCCM
                #01:30SCCM
                #1.5:55SCCM
                #02:100SCCM
                #2.5:175SCCM
                #03:300SCCM
                #3.5:550SCCM
                #04:1SLM
                #4.5:1.75SLM
                #05:3SLM
                #5.5:5.5SLM
                #06:10SLM
                Valve Type
                Flow rate at fully closed control valve
                Flow rate control range
                Flow rate measuring range (SEF)
                Operating temperature
                Response
                Linearity
                Repeatability
                50 to 300 kPa (d)
                #5.5, #06: 100 to 300 kPa (d)
                Operating differential pressure (SEF)
                MAX. Operating pressure
                Pressure resistance
                Leak Integrity
                Flow rate setting signal
                Flow rate output signal
                Wetted materials
                1/4 inch VCR equivalent
                Option: 1.125 inch IGS
                Mounting orientation
                *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed
                by the operator, using special software.
                *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
                associated with the full-scale MR and MG number values.
                *3 IGS: Integrated Gas System
                * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
                Mass flow controller model *1 SEC-Z512KX
                Mass flow meter model *1 SEF-Z512KX
                O: Normally open C: Normally closed
                ≤ 2% F.S.
                2-100% of F.S.
                1/2SCCM
                MR/MG number
                #6.5: 22SLM
                #07: 30SLM
                #08: 50SLM
                0-100% of F.S.
                Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)
                ±0.25%F.S.(Flow rate≤25%F.S.)
                5 to 50°C (recommended temperature range: 15 to 45°C)
                ≤ 1 second: Over full flow rate range
                ≤ ±0.5% F.S.
                ≤ ±0.2% F.S.
                Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
                ≤ 300 kPa (d)
                450 kPa (g)
                1000 kPa (g)
                ≤ 5 x 10-12 Pa·m3/s (He)
                0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher
                0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher
                Digital interface
                With address function: RS-485 (transmission speed 38,400 bps)
                F-Net Protocol
                316L Stainless Steel (polished surface)
                Power supply
                +15V±5% 150mA
                -15V±5% 150mA
                Signal response
                Analog: D-Sub 9-pin (TOP)
                Digital: 2 LAN jacks (TOP)
                Standard Fitting *3
                1/4 inch VCR equivalent
                Option: 1.125 inch IGS, 1.5 inch IGS
                1.5 inch IGS
                Free
                Z512/522 Web Ver.001
                Subject to change without notice.

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