三分时时彩软件

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                您的位置:网站首页 ? 产品中心 ? HORIBA质量流阳正天淡淡笑道量三分时时彩是正规的吗
                HORIBA质量流量三分时时彩是正规的吗

                SEC-Z524MGX质量流量三分时时彩是正规的吗

                产品分类:HORIBA质量流量三分时时彩是正规的吗

                产品介绍

                Z514, Z524 DevicenetTM
                Mass Flow Controller / Meter
                Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
                Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX
                Full-scale flow rate MR/MG number
                (N2 conversion flow rate) #R01:10SCCM
                #R1.5:17.5SCCM
                #01:30SCCM
                #1.5:55SCCM
                #02:100SCCM
                #2.5:175SCCM
                #03:300SCCM
                #3.5:550SCCM
                #04:1SLM
                #4.5:1.75SLM
                #05:3SLM
                #5.5:5.5SLM
                #06:10SLM
                Valve Type
                Flow rate at fully closed control valve
                Flow rate control range
                Flow rate measuring range (SEF)
                Operating temperature
                Response
                Linearity
                Repeatability
                50 to 300 kPa (d)
                #5.5, #06: 100 to 300 kPa (d)
                Operating differential pressure (SEF)
                MAX. Operating pressure
                Pressure resistance
                Leak Integrity
                Digital interface
                Wetted materials
                Power supply
                1/4 inch VCR equivalent
                Option: 1.125 inch IGS
                Mounting orientation
                *1 The gas type and full scale settings for the SEC(SEF)-Z514MGX and Z524MGXN can be changed by
                the operator, using special software.
                *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
                associated with the full-scale MR and MG number values.
                *3 IGS: Integrated Gas System
                * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
                ≤ 2% F.S.
                2-100% of F.S.
                0-100% of F.S.
                ≤ 1 second: Over full flow rate range
                ≤ ±0.5% F.S.
                ≤ ±0.2% F.S.
                ±0.25% F.S. (Flow rate ≤ 25% F.S.)
                Conforming to ODVA standards, DC 24 V, 4.0 VA
                450kPa(g)
                Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
                ≤ 300 kPa (d)
                1000kPa(g)
                ≤ 5 x 10-12Pa·m3/s (He)
                DeviceNet? Protocol
                316L Stainless Steel (polished surface)
                Standard Fitting *3 1/4 inch VCR equivalent 1.5 inch IGS
                Free
                Option: 1.125 inch IGS, 1.5 inch IGS
                1/2SCCM
                MR/MG number
                O: Normally open C: Normally closed
                #6.5:22SLM
                #07:30SLM
                #08:50SLM
                Accuracy *2 ±1.0%F.S. ±1.0% S.P. (Flow rate > 25% F.S.)
                5 to 50°C (recommended temperature range: 15 to 45°C)
                Z514/524 Web Ver.001
                Subject to change without notice.

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